Teledyne DALSA Announces Electrostatic Actuator IC for MEMS Micro-Mirror Systems

The DH0485A extends Teledyne DALSA's industry leading MEMS and MOEMS capability and provides a cost-effective solution for Optical MEMS.

BROMONT, Quebec - March 3, 2014 - Teledyne DALSA's Semiconductor Foundry, a division of Teledyne Technologies, announced today the availability of its DH0485A Electrostatic Actuator High Voltage IC. Using proprietary High Voltage CMOS/DMOS technology, the DH0485A's high accuracy, small footprint and low power is designed for portable systems containing MEMS Micro-Mirrors with up to 4 electrodes. This device showcases Teledyne DALSA Semiconductor's suite of product development and manufacturing capabilities for MEMS/CCD/HV-CMOS solutions as required by ROADM, WSS, OXC and Integrable Tunable Lasers.


"Sophisticated High Voltage design permits us to electrostatically actuate one biaxial or two uni-axial MEMS Micro-Mirrors up to 240V" said Remi Meingan, Senior Product Manager. "With an internal DC to DC Boost Converter, a 16 Bit DAC with SPI Interface and advanced QFN Package, the DH0485A is the ideal solution for optical applications using MEMS Micro-Mirrors with 4 electrodes and needing accurate positioning."

The DH0485A extends Teledyne DALSA's industry leading MEMS and MOEMS capability and provides a cost-effective solution for Optical MEMS. The DH0485A requires only a low voltage supply; the High Voltage Output is provided through a DC/DC Boost Converter up to 240V using an external miniaturized surface mount coil. The DH0485A is packaged in QFN 33L, 6x6mm, 0.5P and is ROHS compliant.

Key Features

*Four independent 16-bit High Voltage Amplifiers up to 240V

*2-bit Voltage Selector pins allowing 90V, 115V, 170V and 240V Outputs, via a DC/DC Step-up Converter and Internal Loop Gain

*Standard SPI®/3-wire serial interface for DAC programming up to 50MHz

*Low Pass Filter to avoid resonance frequency of MEMS

*Low Noise

*Low Power Consumption

*Internal Diode for Temperature Monitoring

*Small footprint and Form Factor with QFN Package

DH0485A samples will be available in Q1 of 2014. To learn more, visit the product page or attend OFC/NFOEC 2014 where details will be presented regarding the DH0485A Electrostatic Actuator High Voltage IC for next-generation, high density, low power optical system requirements using MOEMS. More details will be available in Booth 4653.

About Teledyne DALSA Semiconductor
Located in Bromont, Quebec, Canada, Teledyne DALSA's award winning pure-play semiconductor wafer foundry has a proud history of innovation in specialties such as MEMS, CCDs, and high voltage CMOS. The foundry delivers innovative capabilities as a manufacturing partner to fabless and fab-lite semiconductor companies to help them succeed with their advanced MEMS or High Voltage Electrostatic Actuator designs. Visit www.teledynedalsa.com/semi/ for more information.

Teledyne DALSA, a Teledyne Technologies company, is an international leader in high performance digital imaging and semiconductors with approximately 1,000 employees worldwide, headquartered in Waterloo, Ontario, Canada. Established in 1980, the company designs, develops, manufactures and markets digital imaging products and solutions, in addition to providing MEMS products and services. For more information, visit Teledyne DALSA's website at www.teledynedalsa.com.

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