New XYZ-Tip-Tilt Air Bearing Stage, from PI
5-DOF Motion Designed for Semiconductor, Optics and Photonics Applications
PI (Physik Instrumente) has introduced the A-725, a five-axis air bearing nanopositioning system that pairs a true planar XY stage with an integrated parallel-kinematics Z-?X-?Y module. Designed and built in the US by the global leader in precision motion control and nanoscale positioning, PI's 5-DOF stage targets semiconductor manufacturing, photonics, metrology, microscopy, and precision automation, offering frictionless motion, high geometric accuracy, and precise multi-axis alignment in a compact package.
Launching at Photonics West, the A-725 is available in different configurations with XY travel ranging from 100×100 mm to 300×400 mm, along with 5 mm of Z travel and ±2° of tip/tilt. With a 250 mm platform diameter and payload capacity up to 8 kg, it's suited to demanding tasks like optical inspection, alignment, and laser dicing.
Low-Profile Planar XY Base Stage
The A-725 is built on PI's A-311 planar air bearing stage, where the platform moves across a single reference plane in both X and Y — unlike conventional stacked designs. This eliminates stacking errors and minimizes Abbe offsets, improving geometric accuracy over stacked or mechanical-bearing alternatives. Read this tech blog comparison on design types.
Parallel-Kinematics Z-Tip-Tilt Module
Mounted above the base stage, PI's A-523 Z-?X-?Y module delivers vertical and angular positioning while maintaining a low center of gravity.
Direct-Drive, Turnkey Design - Tuned and Tested with EtherCat Controller
Ironless three-phase linear motors drive all five axes, removing friction, backlash, cogging, and wear. Each system ships wired, tested, and servo-tuned with PI ACS-based controllers, reducing commissioning time. Learn more about air bearing applications.
Specifications, Datasheet: 5-Axis Air Bearing Stage
Watch the Video: Systems in Motion: Improving Wafer Inspection & Metrology w/Air Bearings and Piezo Nanopositioning Stages
Applications and Industries Served
Semiconductor test and manufacture, wafer stealth slicing, optical metrology, photonics alignment, material research, laser processing
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