Large Aperture Direct Drive Rotary Servo Tables for Wafer Processing
Direct drive rotary servo table features large center aperture, high precision and ultra-thin profile
IntelLiDrives released new large aperture rotary tables ACR-335UT Series
ULTRA LOW PROFILE, VERY LARGE APERTURE
The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.
Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.
HIGH PRECISION, HIGH DYNAMICS
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with very low velocity ripple and accelerate quickly to 300 rpm.
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
APPLICATIONS, CONFIGURATION
Ultra-thin series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from precision indexing to high-speed laser machining to precision wafer inspection.
IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
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