Large Aperture Direct Drive Rotary Servo Tables for Wafer Processing

Direct drive rotary servo table features large center aperture, high precision and ultra-thin profile

IntelLiDrives released new large aperture rotary tables ACR-335UT Series


ULTRA LOW PROFILE, VERY LARGE APERTURE

The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.

Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.

HIGH PRECISION, HIGH DYNAMICS

ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with very low velocity ripple and accelerate quickly to 300 rpm.

This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.

APPLICATIONS, CONFIGURATION

Ultra-thin series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from precision indexing to high-speed laser machining to precision wafer inspection.

IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

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