Wafer Stages for Thin Film Metrology and Glass Substrate Inspection

Visit http://www.pi-usa.us for further information

Configurable, granite-based wafer-stage sub-system, new from PI.

05/29/24, 06:23 AM | Industrial Robotics, Factory Automation | PI USA (Physik Instrumente)

Auburn, MA - PI, a global leader in nanopositioning and motion control, is offering granite-based multi-axis precision motion systems for the automation of wafer metrology, glass substrate inspection and lithography applications. These highly accurate stages are based on modular concepts that allow fast customizations. Several technologies are available including air bearings, rails-on-granite, and several types of piezo drive systems. Large travel ranges of one meter and more can be achieved with a variety of different configurations. The XYZ-Theta example stage shown is designed for thin film metrology equipped with direct drive motors, nanometer resolution encoders, and high-performance ACS motion controllers.


PI's advanced design expertise and long experience as a supplier to top tier semiconductor manufacturers and leading system integrators enables us to understand and meet the high demands of the industry, including copy exactly and meeting strict cleanroom requirements.

Industries Served
Semiconductors, photonics, optics, automation, metrology

05/29/24, 06:23 AM | Industrial Robotics, Factory Automation | PI USA (Physik Instrumente)
Subscribe to Newsletter
More Industrial Robotics News | Stories | Articles

Featured Product

US Digital's New L2 Low Profile Motor Encoder

US Digital's New L2 Low Profile Motor Encoder

The L2 incremental encoder uses US Digital's proven EM1 optical encoder module and disk, which has billions of device-hours of dependable service in customer applications. This product continues US Digital's strong reputation for reliable, field-tested encoders. The L2 is US Digital's lowest height encoder that uses the EM1 module. It has a 0.75 in. bolt-spacing mount. The maximum resolution is 1250 CPR (5000 PPR with quadrature). The L2 comes with a single-ended output. Another benefit of the L2 incremental encoder is its fast installation. The cover snaps onto the base to secure the module. It is designed for use with a high-retention connector or cable (sold separately). Like all US Digital products, the L2 is designed and manufactured in Vancouver, Washington, USA. It is backed by prompt access to our technical and customer service teams with same-day shipping on most orders.
More Products
Feature Your Product