Large Aperture Direct Drive Rotary Servo Tables for Wafer Processing
Direct drive rotary servo table features large center aperture, high precision and ultra-thin profile
IntelLiDrives released new large aperture rotary tables ACR-335UT Series
ULTRA LOW PROFILE, VERY LARGE APERTURE
The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.
Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.
HIGH PRECISION, HIGH DYNAMICS
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with very low velocity ripple and accelerate quickly to 300 rpm.
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
APPLICATIONS, CONFIGURATION
Ultra-thin series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from precision indexing to high-speed laser machining to precision wafer inspection.
IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
Featured Product
Elmo Motion Control - The Platinum Line, a new era in servo control
Significantly enhanced servo performance, higher EtherCAT networking precision, richer servo operation capabilities, more feedback options, and certified smart Functional Safety. Elmo's industry-leading Platinum line of servo drives provides faster and more enhanced servo performance with wider bandwidth, higher resolutions, and advanced control for better results. Platinum drives offer precise EtherCAT networking, faster cycling, high synchronization, negligible jitters, and near-zero latency. They are fully synchronized to the servo loops and feature-rich feedback support, up to three feedbacks simultaneously (with two absolute encoders working simultaneously). The Platinum Line includes one of the world's smallest Functional Safety, and FSoE-certified servo drives with unique SIL capabilities.
